There are a few main types of mass flow controllers used in semiconductor equipment. The first type of MFC uses a thermal sensor to measure the mass flow, due to their simplicity, and ability to detect small flow rates. The thermal MFC's internal flow path directs flow in towards one of two paths.

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Flow Meters & controllers are used to control the rate at which gases or In processing applications, precise and dependable mass flow measurement is a 

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Thermal flow measuring principle This measuring principle is based on the fact that heat is drawn from a heated body when a fluid flows past. A thermal 

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The temperature difference between the two thermocouples is proportional to the heat flow through the capillary tube. The heat flow, in turn, is proportional to the mass flow times the specific heat (Cp) of the gas. So, to first order, if you want to use a thermal mass flow meter that has been set up for one gas, and use it with another gas

Thermal flow meters are primarily used in air and gas flow measurement As the flow rate increases, heat gets taken away from the heated sensor in the 

Request PDF | Experimental and numerical analysis of heat transfer phenomena in a sensor tube of a mass flow controller | In the present work, the heat